Z512, Z522 Digital / Analog

　　Mass Flow Controller / Meter

　　SEC-Z512MGX SEC-Z522MGXN SEC-Z522MGX

　　SEC-Z512X SEC-Z522XN SEC-Z522X

　　SEF-Z512MGX SEF-Z522MGXN SEF-Z522MGX

　　SEF-Z512X SEF-Z522XN SEF-Z522X

　　Full-scale flow rate MR/MG number

　　(N2 conversion flow rate) #R01:10SCCM

　　#R1.5:17.5SCCM

　　#01:30SCCM

　　#1.5:55SCCM

　　#02:100SCCM

　　#2.5:175SCCM

　　#03:300SCCM

　　#3.5:550SCCM

　　#04:1SLM

　　#4.5:1.75SLM

　　#05:3SLM

　　#5.5:5.5SLM

　　#06:10SLM

　　Valve Type

　　Flow rate at fully closed control valve

　　Flow rate control range

　　Flow rate measuring range (SEF)

　　Operating temperature

　　Response

　　Linearity

　　Repeatability

　　50 to 300 kPa (d)

　　#5.5, #06: 100 to 300 kPa (d)

　　Operating differential pressure (SEF)

　　MAX. Operating pressure

　　Pressure resistance

　　Leak Integrity

　　Flow rate setting signal

　　Flow rate output signal

　　Wetted materials

　　1/4 inch VCR equivalent

　　Option: 1.125 inch IGS

　　Mounting orientation

　　*1 The gas type and full scale settings for the SEC(SEF)-Z512MGX, Z522MGX, and Z522MGXN can be changed

　　by the operator, using special software.

　　*2 The flow rate precision guaranteed temperatures conform to SEMI E56-1296 standards. The precision is that

　　associated with the full-scale MR and MG number values.

　　*3 IGS: Integrated Gas System

　　* SCCM and SLM are notations indicating the gas flow rate (mL/min, L/min, at 0°C and 101.3 kPa).

　　Mass flow controller model *1 SEC-Z512KX

　　Mass flow meter model *1 SEF-Z512KX

　　O: Normally open C: Normally closed

　　≤ 2% F.S.

　　2-100% of F.S.

　　1/2SCCM

　　MR/MG number

　　#6.5: 22SLM

　　#07: 30SLM

　　#08: 50SLM

　　0-100% of F.S.

　　Accuracy *2 ±1.0%F.S. ±1.0%S.P.(Flow rate>25%F.S.)

　　±0.25%F.S.(Flow rate≤25%F.S.)

　　5 to 50°C (recommended temperature range: 15 to 45°C)

　　≤ 1 second: Over full flow rate range

　　≤ ±0.5% F.S.

　　≤ ±0.2% F.S.

　　Operating differential pressure 50 to 300 kPa (d) 200 to 300 kPa (d)

　　≤ 300 kPa (d)

　　450 kPa (g)

　　1000 kPa (g)

　　≤ 5 x 10-12 Pa·m3/s (He)

　　0.1 to 5 V DC (2% to F.S.); Input impedance 1 MÙ or higher

　　0 to 5 V DC (0% to F.S.); Minimum load resistance 2 kÙ or higher

　　Digital interface

　　With address function: RS-485 (transmission speed 38,400 bps)

　　F-Net Protocol

　　316L Stainless Steel (polished surface)

　　Power supply

　　+15V±5% 150mA

　　-15V±5% 150mA

　　Signal response

　　Analog: D-Sub 9-pin (TOP)

　　Digital: 2 LAN jacks (TOP)

　　Standard Fitting *3

　　1/4 inch VCR equivalent

　　Option: 1.125 inch IGS, 1.5 inch IGS

　　1.5 inch IGS

　　Free

　　Z512/522 Web Ver.001

　　Subject to change without notice.